The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2013
Filed:
Nov. 23, 2005
Applicant:
Kenneth Allen Aitchison, Los Gatos, CA (US);
Inventor:
Kenneth Allen Aitchison, Los Gatos, CA (US);
Assignee:
Edwards Limited, Crawley, West Sussex, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 7/04 (2006.01); B08B 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention relates to vacuum processing systems in which process gases are introduced in a process chamber and are exhausted through a vacuum processing system exhaust path. Deposits made by the exhausted gas are reduced or eliminated by introducing a reactive gas upstream of the device affected by deposits. The amount of introduced reactive gas is controlled by measuring gas phase concentrations of exhausted gas components upstream and downstream of the affected device, and, from those measurements, determining whether the components are being consumed in deposits on the affected device.