The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 26, 2013

Filed:

Jul. 13, 2009
Applicants:

Chen-der Tsai, Hsinchu County, TW;

Wen-tung Hsu, Hsinchu County, TW;

Chin-jyi Wu, Kaohsiung, TW;

Chih-wei Chen, Taipei County, TW;

Inventors:

Chen-Der Tsai, Hsinchu County, TW;

Wen-Tung Hsu, Hsinchu County, TW;

Chin-Jyi Wu, Kaohsiung, TW;

Chih-Wei Chen, Taipei County, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/50 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01); H01J 7/24 (2006.01);
U.S. Cl.
CPC ...
Abstract

A wide area atmospheric pressure plasma jet apparatus including a transmission mechanism, a plasma housing and two plasma-generating devices is provided. The transmission mechanism includes a rotation output end that has a center axis. The plasma housing has an opening. The plasma housing further has a air-attracting hole near the rotation output end and extended from an outer wall of the plasma housing to the interior of the plasma housing, so that the heat of the plasma housing can be dissipated due to the generated gas circulation. The plasma-generating devices are disposed within the plasma housing and connected with the rotation output end. Each of the plasma-generating devices has a plasma nozzle located at the opening and tilts from the center axis. When the rotation output end drives the plasma-generating devices to rotate, two plasma beams are obliquely ejected from the plasma nozzle and the plasma processing area is increased.


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