The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2013
Filed:
Oct. 28, 2010
Kazuya Matsumoto, Nagano, JP;
Ryo Ohta, Nagano, JP;
Mamoru Hasegawa, Nagano, JP;
Hideo Adachi, Iruma, JP;
Katsuhiro Wakabayashi, Hachioji, JP;
Kazuya Matsumoto, Nagano, JP;
Ryo Ohta, Nagano, JP;
Mamoru Hasegawa, Nagano, JP;
Hideo Adachi, Iruma, JP;
Katsuhiro Wakabayashi, Hachioji, JP;
Olympus Medical Systems Corp., Tokyo, JP;
Olympus Corporation, Tokyo, JP;
Abstract
An ultrasonic transducer fabrication method including: depositing a conductive material on an insulating layer, partially etching the conductive material to form lower electrodes; depositing an insulating material to cover the lower electrodes to form a first insulating layer and depositing a sacrificial material thereon, performing etching, to create cavities and a channel-shaped sacrificial layer to communicate the cavities; depositing an insulating material on the first insulating layer to form a second insulating layer; partially etching the second insulating layer to form holes; etching and removing the sacrificial layer through the holes to form the cavities and channels; depositing a conductive material on the second insulating layer to plug the holes and form a conductive film; partially etching the conductive film to form upper electrodes and sealing portions which plug the holes; and forming a protective film on the second insulating layer to cover the upper electrodes and the sealing portions.