The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2013
Filed:
May. 11, 2011
Jea Shik Shin, Hwaseong-si, KR;
Seong Chan Jun, Seoul, KR;
Yun Kwon Park, Dongducheon-si, KR;
IN Sang Song, Hwaseong-si, KR;
Young IL Kim, Suwon-si, KR;
Duck Hwan Kim, Goyang-si, KR;
Chul Soo Kim, Hwaseong-si, KR;
Jea Shik Shin, Hwaseong-si, KR;
Seong Chan Jun, Seoul, KR;
Yun Kwon Park, Dongducheon-si, KR;
In Sang Song, Hwaseong-si, KR;
Young Il Kim, Suwon-si, KR;
Duck Hwan Kim, Goyang-si, KR;
Chul Soo Kim, Hwaseong-si, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Industry-Academic Cooperation Foundation, Yonsei University, Seoul, KR;
Abstract
A resonator and a method of manufacturing a resonator are provided. The resonator includes a sacrificial layer formed on a substrate, and a resonant structure formed on the sacrificial layer, the resonant structure comprising a carbon nano-substance layer and a silicon carbide layer.