The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2013
Filed:
Dec. 30, 2011
Vikas Gupta, Dallas, TX (US);
Jeremias Perez Libres, Garland, TX (US);
Joseph Edward Grigalunas, Dallas, TX (US);
Vikas Gupta, Dallas, TX (US);
Jeremias Perez Libres, Garland, TX (US);
Joseph Edward Grigalunas, Dallas, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
Apparatus for assembling a semiconductor device has a plate with body and a surface heatable to a controlled a temperature profile from location to location across the plate. Mesas at same temperature of plate protrude from the surface are configured to support a portion of the substrate. Movable capillaries have openings for blowing cooled gas onto selected locations of the assembly. At least one movable syringe movable has an opening for dispensing a polymer precursor.