The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2013
Filed:
Apr. 22, 2010
Yu-chia Tsao, Taipei, TW;
Chung-pei Lee, Taipei, TW;
Ko-shao Chen, Taipei, TW;
Jia-huey Tsao, Yingge Township, Taipei County, TW;
Chun-chih Lin, Taipei, TW;
Ren-kun Liang, Sanchong, TW;
Yu-Chia Tsao, Taipei, TW;
Chung-Pei Lee, Taipei, TW;
Ko-Shao Chen, Taipei, TW;
Jia-Huey Tsao, Yingge Township, Taipei County, TW;
Chun-Chih Lin, Taipei, TW;
Ren-Kun Liang, Sanchong, TW;
Abstract
A method for real-timely monitoring thickness change of a coating film is disclosed. In the method, a coating module having a chamber and a film thickness-monitoring module containing an SPR optical fiber sensor, a light source, a light-receiving detector, and optical fibers are first provided. The optical fibers are used to connect the SPR optical fiber sensor with the light source and the light-receiving detector. The SPR optical fiber sensor has a sensing area and is arranged in the chamber. The light source provides the SPR optical fiber sensor with light. Then, a substrate is put into the chamber. While coating process is performed on the substrate, a film is also formed on the sensing area of the SPR optical fiber sensor. The light-receiving detector receives signals output from the sensing area of the SPR optical fiber sensor and then outputs signals of light-intensity change.