The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 19, 2013

Filed:

Feb. 22, 2011
Applicants:

Nam-seok Suh, Asan-si, KR;

Sun-young Hong, Yongin-si, KR;

Jong-hyun Choung, Hwaseong-si, KR;

Bong-kyun Kim, Hwaseong-si, KR;

Hong-sick Park, Suwon-si, KR;

Jean-ho Song, Yongin-si, KR;

Wang-woo Lee, Suwon-si, KR;

Do-won Kim, Hwaseong-si, KR;

Sang-woo Kim, Hwaseong-si, KR;

Won-guk Seo, Hwaseong-si, KR;

Hyun-cheol Shin, Hwaseong-si, KR;

Ki-beom Lee, Hwaseong-si, KR;

Sam-young Cho, Hwaseong-si, KR;

Inventors:

Nam-Seok Suh, Asan-si, KR;

Sun-Young Hong, Yongin-si, KR;

Jong-Hyun Choung, Hwaseong-si, KR;

Bong-Kyun Kim, Hwaseong-si, KR;

Hong-Sick Park, Suwon-si, KR;

Jean-Ho Song, Yongin-si, KR;

Wang-Woo Lee, Suwon-si, KR;

Do-Won Kim, Hwaseong-si, KR;

Sang-Woo Kim, Hwaseong-si, KR;

Won-Guk Seo, Hwaseong-si, KR;

Hyun-Cheol Shin, Hwaseong-si, KR;

Ki-Beom Lee, Hwaseong-si, KR;

Sam-Young Cho, Hwaseong-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B44C 1/22 (2006.01); C03C 15/00 (2006.01); C03C 25/68 (2006.01); C23F 1/00 (2006.01); C25F 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

Exemplary embodiments of the present invention provide a metal wiring etchant. A metal wiring etchant according to an exemplary embodiment of the present invention includes ammonium persulfate, an organic acid, an ammonium salt, a fluorine-containing compound, a glycol-based compound, and an azole-based compound.


Find Patent Forward Citations

Suh, Nam-Seok. (2013). Etchant for metal wiring and method for manufacturing metal wiring using the same (U.S. Patent No. 8377325). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8377325

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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