The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 19, 2013

Filed:

Sep. 28, 2011
Applicants:

Yunsub Jung, Seoul, KR;

Keunho Kim, Ulsan, KR;

Yeokyun Yoon, Daejeon, KR;

Ted Kim, Daejeon, KR;

Inventors:

Yunsub Jung, Seoul, KR;

Keunho Kim, Ulsan, KR;

Yeokyun Yoon, Daejeon, KR;

Ted Kim, Daejeon, KR;

Assignee:

Siliconvalue LLC., Daejeon, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/442 (2006.01); C23C 16/24 (2006.01); B01J 8/18 (2006.01); C01B 33/02 (2006.01); G05D 9/00 (2006.01); G05D 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A polycrystal silicon manufacturing apparatus and a method of manufacturing polycrystal silicon using the same are disclosed. The polycrystal silicon manufacturing apparatus includes a reaction pipe comprising silicon particles provided therein; a flowing-gas supply unit configured to supply flowing gas to the silicon particles provided in the reaction pipe; and a first pressure sensor configured to measure a pressure of a first area in the reaction pipe; a second pressure sensor configured to measure a pressure of a second area in the reaction pipe; and a particle outlet configured to exhaust polycrystal silicon formed in the reaction pipe outside, when a difference between a first pressure measured by the first pressure sensor and a second pressure measured by the second pressure sensor is a reference pressure value or more.


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