The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2013
Filed:
Mar. 25, 2008
Yuji Yoshida, Tokyo, JP;
Hiroshi Eda, Kasama, JP;
Libo Zhou, Hitachinaka, JP;
Masaaki Kenmochi, Tokyo, JP;
Yoshiaki Tashiro, Tokyo, JP;
Sumio Kamiya, Toyota, JP;
Hisao Iwase, Toyota, JP;
Teruki Yamashita, Toyota, JP;
Noboru Otake, Toyota, JP;
Yuji Yoshida, Tokyo, JP;
Hiroshi Eda, Kasama, JP;
Libo Zhou, Hitachinaka, JP;
Masaaki Kenmochi, Tokyo, JP;
Yoshiaki Tashiro, Tokyo, JP;
Sumio Kamiya, Toyota, JP;
Hisao Iwase, Toyota, JP;
Teruki Yamashita, Toyota, JP;
Noboru Otake, Toyota, JP;
Tokyo Diamond Tools Mfg. Co., Ltd., Tokyo, JP;
Toyota Motor Corporation, Toyota-shi, Aichi, JP;
Abstract
A synthetic grinding stone used for the polishing of a silicon wafer is composed of a structure containing cerium oxide fine particles as abrasive grains, a resin as a binder, a salt as a filler and a nano diamond as an additive. This synthetic grinding stone is characterized in that the purity of the cerium oxide is not less than 60% by weight, the content of the salt as a filler is not less than 1% but not more than 20%, the volume content of the nano diamond as an additive is not less than 0.1% but less than 20% relative to the total volume of the structure, and the porosity as the volume fraction relative to the total volume of the structure is less than 30%.