The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2013
Filed:
Oct. 31, 2007
Daniel T Mudd, Sparks, NV (US);
William W White, Sparks, NV (US);
Virginia Miller, Sparks, NV (US);
Christopher Davis, Richardson, TX (US);
Kimura Miyoshi, Koyoto, JP;
Tadahiro Yasuda, Koyoto, JP;
Daniel T Mudd, Sparks, NV (US);
William W White, Sparks, NV (US);
Virginia Miller, Sparks, NV (US);
Christopher Davis, Richardson, TX (US);
Kimura Miyoshi, Koyoto, JP;
Tadahiro Yasuda, Koyoto, JP;
Horiba, Ltd., Kyoto, JP;
Abstract
A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.