The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2013
Filed:
Oct. 19, 2011
Minoru Matsuzawa, Tokyo, JP;
Minoru Matsuzawa, Tokyo, JP;
Micro Engineering Inc., Tokyo, JP;
Abstract
A protruding portion (), which has a central axis coincident with a rotational axis of a table (), is formed at a center portion of a surface of the table (). At the time of the surface processing, the table () is rotated under a state in which the processing target surface of the substrate () is supported horizontally at each of a plurality of parts on the table () spaced apart from a base end of the protruding portion () toward an outer peripheral end portion of the table () by a predetermined distance and at the same distance from a top end of the protruding portion (). Then, a processing liquid is supplied toward the top end of the protruding portion (). The processing liquid that has reached the processing target surface of each substrate () is then removed outside the table () by centrifugal force.