The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2013
Filed:
Sep. 02, 2009
Applicants:
Thomas Signamarcheix, La Terrasse, FR;
Frederic Allibert, Grenoble, FR;
Chrystel Deguet, Saint Ismier, FR;
Inventors:
Thomas Signamarcheix, La Terrasse, FR;
Frederic Allibert, Grenoble, FR;
Chrystel Deguet, Saint Ismier, FR;
Assignees:
Soitec, Bernin, FR;
Commissariat à l'Énergie Atomique, Paris, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 21/36 (2006.01); H01L 21/00 (2006.01); H01L 21/30 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention relates to a method for fabricating a locally passivated germanium-on-insulator substrate wherein, in order to achieve good electron mobility, nitridized regions are provided at localised positions. Nitridizing is achieved using a plasma treatment. The resulting substrates also form part of the invention.