The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2013
Filed:
Mar. 01, 2011
Alexandre Vaufredaz, La Murette, FR;
Alexandre Vaufredaz, La Murette, FR;
Sebastien Molinari, Sassenage, FR;
Soitec, Bernin, FR;
Abstract
The invention relates to a process for fabricating a multilayer structure that includes bonding a first wafer onto a second wafer, where the first wafer may have a chamfered edge and the bonding interface has an adhesion energy of less than or equal to 1 J/m, and thinning the first wafer so as to form a transferred layer, where before thinning the first wafer, a step of trimming the edge of the first wafer is carried out using a grinding wheel having a working surface which comprises grit particles with an average size of greater than or equal to 800 mesh or less than or equal to 18 microns, and wherein the trimming step is carried out by lowering the grinding wheel at a rate of descent of greater than or equal to 5 microns per second, such that the descent of the grinding wheel into the first wafer continues to a distance from the bonding interface that is less than or equal to 30 μm.