The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2013
Filed:
Sep. 14, 2010
Joseph F. Sommers, San Jose, CA (US);
Jiansheng Wang, Union City, CA (US);
David DO, Milpitas, CA (US);
Satyanarayana Adamala, Fremont, CA (US);
Ronald Trahan, Beverton, OR (US);
Joseph F. Sommers, San Jose, CA (US);
Jiansheng Wang, Union City, CA (US);
David Do, Milpitas, CA (US);
Satyanarayana Adamala, Fremont, CA (US);
Ronald Trahan, Beverton, OR (US);
Quantum Global Technologies, LLC, Dublin, PA (US);
Abstract
Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component part. In one embodiment, a system for cleaning component parts in a cleaning chemistry is provided. The system comprises a wet bench set-up comprising a cleaning vessel assembly for holding one or more component parts to be cleaned during a cleaning process and a detachable cleaning cart detachably coupled with the cleaning vessel assembly for supplying one or more cleaning chemistries to the cleaning vessel assembly during the cleaning process.