The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2013
Filed:
Sep. 30, 2005
Juan Chacin, Palo Alto, CA (US);
Aaron Hunter, Santa Cruz, CA (US);
Craig Metzner, Fremont, CA (US);
Roger N. Anderson, Sunnyvale, CA (US);
Juan Chacin, Palo Alto, CA (US);
Aaron Hunter, Santa Cruz, CA (US);
Craig Metzner, Fremont, CA (US);
Roger N. Anderson, Sunnyvale, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A film formation systemincludes a processing chamberbounded by sidewallsand a top cover. In one embodiment, a susceptoris rotatably disposed in the system, and overlaps with a first peripheral memberdisposed around the sidewalls. A radiant heating systemis disposed under the susceptorto heat the substrate. In another embodiment, the top coverhas equally spaced pyrometersfor measuring the temperature of the substrateacross a number of zones. The temperature of the substrateis obtained from pyrometric data from the pyrometers