The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2013
Filed:
Oct. 01, 2008
Nozomu Hayashi, Utsunomiya, JP;
Nozomu Hayashi, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A position detector, which detects the position of a mark formed on a substrate (W), comprises a creating unit (), a search unit (), and a correction unit (). The creating unit () creates a template used for identifying a mark to be detected (WM) based on an image including the mark (WM). The search unit () searches an image by using the template created by the creating unit (), and determines whether there is a pseudo pattern, other than the pattern of the mark (WM), whose degree of matching with the template is higher than a reference value. The correction unit () corrects the template based on the information of the pseudo pattern when it is determined that there is the pseudo pattern, and creates a corrected template whose degree of matching with the pseudo pattern is lower than the reference value.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile