The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2013
Filed:
Oct. 20, 2011
Applicants:
Lars Markwort, Haimhausen, DE;
Rajeshwar Chhibber, San Jose, CA (US);
Inventors:
Lars Markwort, Haimhausen, DE;
Rajeshwar Chhibber, San Jose, CA (US);
Klaus Eckerl, Hutthurm, DE;
Norbert Harendt, Hutthurm, DE;
Assignee:
Nanda Technologies GmbH, Unterschleissheim, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G06K 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An inspection system includes optics, an object support for mounting an object in a region of an object plane of the optics, a bright-field light source, and a dark-field light source. The inspection system also includes an image detector having a radiation sensitive substrate disposed in a region of an image plane of the optics and a beam dump.
Markwort, Lars. (2013). Optical inspection system and method (U.S. Patent No. 8368881). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8368881
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile