The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2013
Filed:
Jan. 09, 2009
Michio Takahashi, Nagoya, JP;
Hiroshi Mizuno, Nagoya, JP;
Masaaki Masuda, Nagoya, JP;
NGK Insulators, Ltd., Nagoya, JP;
Abstract
The ceramic plasma reactor includes: a plurality of unit electrodes each of which comprises a plate-shaped ceramic dielectric bodyand a conductive filmembedded in the ceramic dielectric body superimposing them each other with a gap which works as a discharge portion, and preferably being formed by sandwiching one unit electrodehaving no through holesby two unit electrodes having plural through holesthere between. A partition wall plateis provided by facing one of unit electrodes on a side opposite to the gap and being held by a holding memberat a predetermined distance so as to form there between a gas introducing-circulating portionfor introducing and circulating gas in the through-holesso as to send gas introduced to the gap between the unit electrodes as a discharge portion by applying a voltage thereto to generate plasma.