The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2013
Filed:
Dec. 20, 2010
Lawrence Chung-lai Lei, Milpitas, CA (US);
Alfred Mak, Fremont, CA (US);
Rex Liu, Castro Valley, CA (US);
Kon Park, Livermore, CA (US);
Samuel S. Pak, San Ramon, CA (US);
Tzy-chung Terry Wu, Palo Alto, CA (US);
Simon Zhu, Sunnyvale, CA (US);
Ronald L. Rose, San Jose, CA (US);
Gene Shin, San Jose, CA (US);
Xiaoming Wang, San Jose, CA (US);
Lawrence Chung-Lai Lei, Milpitas, CA (US);
Alfred Mak, Fremont, CA (US);
Rex Liu, Castro Valley, CA (US);
Kon Park, Livermore, CA (US);
Samuel S. Pak, San Ramon, CA (US);
Tzy-Chung Terry Wu, Palo Alto, CA (US);
Simon Zhu, Sunnyvale, CA (US);
Ronald L. Rose, San Jose, CA (US);
Gene Shin, San Jose, CA (US);
Xiaoming Wang, San Jose, CA (US);
Archers Inc., Georgetown, KY;
Abstract
In accordance with some embodiments described herein, a method for transferring a substrate is provided. The method includes loading one or more substrates into a respective mobile chamber of one or more mobile chambers. The mobile chambers are movable on a first rail positioned adjacent to two or more process modules. Each mobile chamber is configured to maintain a specified gas condition. The respective mobile chamber is moved along the first rail. The respective mobile chamber is docked to a respective process module of the two or more process modules. At least one of the one or more substrates is conveyed from the respective mobile chamber to the respective process module.