The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 05, 2013

Filed:

Nov. 21, 2011
Applicants:

Won Tae Lee, Gyeonggi-Do, KR;

Han Sick Cho, Gyeonggi-Do, KR;

Hyung Su Kim, Seoul, KR;

Inventors:

Won Tae Lee, Gyeonggi-Do, KR;

Han Sick Cho, Gyeonggi-Do, KR;

Hyung Su Kim, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 21/36 (2006.01); C23C 16/24 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of fabricating a polycrystalline silicon thin that includes a metal layer forming operation of forming a metal layer on an insulating substrate, a first silicon layer forming operation of stacking a silicon layer on the metal layer formed in the metal layer forming operation, a first annealing operation of forming a silicide layer using by moving catalyst metal atoms from the metal layer to the silicon layer using an annealing process, a second silicon layer forming operation of stacking an amorphous silicon layer on the silicide layer, and a crystallization operation of crystallizing the amorphous silicon layer into crystalline silicon through the medium of particles of the silicide layer.


Find Patent Forward Citations

Lee, Won. (2013). Method of fabricating polycrystalline silicon thin film (U.S. Patent No. 8367527). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8367527

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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