The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2013
Filed:
Oct. 26, 2004
Applicants:
Jacob M. J. Den Toonder, Eindhoven, NL;
Auke R. Van Dijken, Eindhoven, NL;
Theodoor G. S. M. Rijks, Eindhoven, NL;
Jozef T. M. Van Beek, Rosmalen, NL;
Inventors:
Jacob M. J. Den Toonder, Eindhoven, NL;
Auke R. Van Dijken, Eindhoven, NL;
Theodoor G. S. M. Rijks, Eindhoven, NL;
Jozef T. M. Van Beek, Rosmalen, NL;
Assignee:
EPCOS AG, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 15/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An RF MEMS device comprising one or more free-standing thin films configured for motion in response to actuation or stimulation, the one or more thin films comprising an alloy of aluminum and magnesium, and optionally one or more further materials. The resultant thin film has improved hardness and reduced creep relative to conventional thin films.