The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2013
Filed:
Feb. 25, 2009
Applicants:
Toshihiko Kanayama, Tsukuba, JP;
Noriyuki Uchida, Tsukuba, JP;
Inventors:
Toshihiko Kanayama, Tsukuba, JP;
Noriyuki Uchida, Tsukuba, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01B 21/068 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention relates to a thin film of a metal-silicon compound and a process for producing the thin film of the metal-silicon compound. The metal-silicon compound is a compound of a transition metal and silicon, and has a transition metal-containing silicon cluster as a unit structure, the transition metal-containing silicon cluster having a structure in which a transition metal atom is surrounded by seven to sixteen silicon atoms, two of which are first and second neighbor atoms to the transition metal atom.