The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2013
Filed:
May. 31, 2005
Wendell T. Blonigan, Pleasanton, CA (US);
Carl Sorensen, Morgan Hill, CA (US);
John M. White, Hayward, CA (US);
Robin L. Tiner, Santa Cruz, CA (US);
Wendell T. Blonigan, Pleasanton, CA (US);
Carl Sorensen, Morgan Hill, CA (US);
John M. White, Hayward, CA (US);
Robin L. Tiner, Santa Cruz, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Substrate support methods and apparatus include vertically aligned lift pins that have bearing surfaces that engage friction plates and/or magnetic fields to maintain the vertical orientation of the lift pins during substrate lifting. In some embodiments, a magnetic field and/or weighting may alternatively or additionally be used to control the vertical orientation of the lift pins, limit the angle of the lift pins, and/or prevent the lift pins from unintentionally binding in a susceptor as the susceptor is raised and prevent the resulting uneven support of the substrate.