The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2013
Filed:
Nov. 14, 2008
Robert Aigner, Unterhaching, DE;
Lueder Elbrecht, Munich, DE;
Martin Handtmann, Munich, DE;
Stephan Marksteiner, Putzbrunn, DE;
Winfried Nessler, Munich, DE;
Hans-joerg Timme, Ottobrunn, DE;
Robert Aigner, Unterhaching, DE;
Lueder Elbrecht, Munich, DE;
Martin Handtmann, Munich, DE;
Stephan Marksteiner, Putzbrunn, DE;
Winfried Nessler, Munich, DE;
Hans-Joerg Timme, Ottobrunn, DE;
Contria San Limited Liability Company, Wilmington, DE (US);
Abstract
In a method for manufacturing a piezoelectric oscillating circuit in thin film technology, wherein the oscillating circuit includes a predetermined natural frequency and a plurality of layers, first of all at least a first layer of the piezoelectric oscillating circuit is generated. Subsequently, by processing the first layer a frequency correction is performed. Subsequently, at least a second layer of the piezoelectric oscillating circuit is generated and processed for performing a second frequency correction.