The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2013
Filed:
Jan. 24, 2011
Shogo Inaba, Shiojiri, JP;
Akira Sato, Fujimi-machi, JP;
Toru Watanabe, Matsumoto, JP;
Takeshi Mori, Matsumoto, JP;
Shogo Inaba, Shiojiri, JP;
Akira Sato, Fujimi-machi, JP;
Toru Watanabe, Matsumoto, JP;
Takeshi Mori, Matsumoto, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
A resonator with a microeletromechanical system structure has a transistor with a gate electrode, a capacitor with an upper and lower electrode, a substrate, a first and second structure of the microelectromechanical system structure, a first silicon layer of the first structure and the upper electrode formed above the substrate, a second silicon layer of the second structure and the gate electrode unit formed above the substrate, and an insulating film formed above the capacitor and the transistor, the insulating film having an opening for placement of the second structure.