Method for making complementary p and n mosfet transistors, electronic device including such transistors, and processor including at least one such device

Abstract

This method for making complementary p and n MOSFET transistors with Schottky source and drain electrodes controlled by a gate electrode, comprising: making source and drain electrodes from a single silicide for both p and n transistors; segregating first impurities from groups II and III of the periodic table at the interface between the silicide and the channel of the p transistor, the complementary n transistor being masked; and segregating second impurities from groups V and VI of the periodic table, at the interface between the silicide and the channel of the n transistor, and the complementary p transistor being masked.