The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 29, 2013

Filed:

Jul. 29, 2010
Applicants:

Koichi Ono, Saitama, JP;

Tomoki Nakao, Saitama, JP;

Akira Niwayama, Saitama, JP;

Inventors:

Koichi Ono, Saitama, JP;

Tomoki Nakao, Saitama, JP;

Akira Niwayama, Saitama, JP;

Assignee:

Enplas Corporation, Saitama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/08 (2006.01); H01L 51/00 (2006.01); H01L 27/14 (2006.01);
U.S. Cl.
CPC ...
Abstract

A micro-channel chip can be coated uniformly with a thin inorganic oxide film and can prevent an ionic hydrophobic substance from adsorbing through a surface of an inorganic oxide film. In the micro-channel chip, surfaces of inner walls of through-holes in an upper plate member and a channel of a lower plate member are entirely coated with a SiOfilm. The SiOfilm is formed of two layers, namely a bottom layer that contains a high content of carbon atoms and is formed in a part that contacts a resin substrate, and a surface layer that contains nearly zero content of carbon atoms and t is formed in a part that is exposed on the surface of a channel.


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