The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2013
Filed:
Dec. 21, 2010
Joachim Zach, Oestringen, DE;
Stephan Uhlemann, Heidelberg, DE;
Joachim Zach, Oestringen, DE;
Stephan Uhlemann, Heidelberg, DE;
CEOS Corrected Electron Optical Systems GmbH, Heidelberg, DE;
Abstract
A corrector () for an electron microscope is proposed which is less sensitive to fluctuations of the electrical power supply if a stigmatic intermediate image () of the axial fundamental rays (x, y) is produced in the quadrupole field (') of a first quadrupole element () and this quadrupole field (′) is set such that astigmatic intermediate images () of the off-axial fundamental rays (x, y) are produced in the region of the center of the quadrupole fields (′) of a third () and fourth multipole element () and there also, due to the setting of the quadrupole field (′) of a second quadrupole element (), the axial fundamental rays (x, y) of the same section (x, y) as that, in which the intermediate images () of the off-axial fundamental rays (x, y) are located, each exhibit a maximum.