The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2013
Filed:
Jun. 01, 2009
Applicants:
Hiroshi Matsutani, Hitachi, JP;
Makoto Kaji, Hitachi, JP;
Koichi Abe, Hitachi, JP;
Yuko Uchimaru, Tsukuba, JP;
Inventors:
Hiroshi Matsutani, Hitachi, JP;
Makoto Kaji, Hitachi, JP;
Koichi Abe, Hitachi, JP;
Yuko Uchimaru, Tsukuba, JP;
Assignee:
Hitachi Chemical Co., Ltd., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
C08C 2/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
Interlayer insulating films(insulating films) provided in a memory capacitor cellare formed between a gate electrodeand a counter electrodeC formed on a silicon wafer. The interlayer insulating filmscomprise a borazine-based resin, having a specific dielectric constant of no greater than 2.6, a Young's modulus of 5 GPa or greater and a leak current of no greater than 1×10A/cm.