The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2013
Filed:
Jun. 02, 2010
Keun-soo Lee, Yongin, KR;
Keun-Soo Lee, Yongin, KR;
Samsung Display Co., Ltd., Giheung-Gu, Yongin, Gyeonggi-Do, KR;
Abstract
A method of fabricating a photo mask for an organic light emitting display comprises forming a light shielding layer on a transparent substrate, coating the light shielding layer with an electron beam resist, performing exposure on the electron beam resist by a vector scan method in accordance with a specific pattern and using an electron beam having a predetermined accelerating voltage, developing the exposed electron beam resist to form an electron beam resist pattern having the specific pattern, and etching the light shielding layer using the electron beam resister pattern as an etching mask. The specific pattern has a shape corresponding to transistors included in a pixel of an organic light emitting display and elements that constitute a capacitor.