The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2013
Filed:
Aug. 19, 2011
Yasufumi Aihara, Nagoya, JP;
Hiroya Sugimoto, Chiryu, JP;
Shunsuke Tanaka, Handa, JP;
Kazuma Ohba, Handa, JP;
Jyunya Waki, Handa, JP;
Yasufumi Aihara, Nagoya, JP;
Hiroya Sugimoto, Chiryu, JP;
Shunsuke Tanaka, Handa, JP;
Kazuma Ohba, Handa, JP;
Jyunya Waki, Handa, JP;
NGK Insulators, Ltd., Nagoya, JP;
Abstract
To form an electrostatic chuck, a bonding sheet is applied onto the upper surface of a cooling plate and then the cooling plate is placed in a vacuum dryer at a pressure of 2,000 Pa or less for a pre-bake treatment at 120° C. to 130° C. for 15 to 40 hours, followed by natural cooling. A plate is then stacked on the bonding sheet so that the lower surface of the plate is aligned with the upper surface of the bonding sheet, which is applied onto the cooling plate. The resulting stacked body is placed in a heat-resistant resin bag, and is then placed in an autoclave and treated together for several hours under pressure and heat.