The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2013
Filed:
Dec. 18, 2002
Elfido Coss, Jr., Austin, TX (US);
Ernest D. Adams, Iii, Austin, TX (US);
Robert J. Chong, Austin, TX (US);
Howard E. Castle, Austin, TX (US);
Thomas J. Sonderman, Austin, TX (US);
Alexander J. Pasadyn, Austin, TX (US);
Elfido Coss, Jr., Austin, TX (US);
Ernest D. Adams, III, Austin, TX (US);
Robert J. Chong, Austin, TX (US);
Howard E. Castle, Austin, TX (US);
Thomas J. Sonderman, Austin, TX (US);
Alexander J. Pasadyn, Austin, TX (US);
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
A method and an apparatus are provided for parallel fault detection. The method comprises receiving data associated with processing of a workpiece by a first processing tool, receiving data associated with processing of a workpiece by a second processing tool and comparing at least a portion of the received data to a common fault model to determine if a fault associated with at least one of the processing of the workpiece by the first processing tool and processing of the workpiece by the second processing tool occurred.