The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2013
Filed:
Aug. 30, 2006
Applicants:
Masahiro Nakahara, Kagoshima, JP;
Tetsuji Hayasaki, Kagoshima, JP;
Yoshihiro Okawa, Kagoshima, JP;
Inventors:
Assignee:
Kyocera Corporation, Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/10 (2006.01); H01L 21/306 (2006.01); C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed is a corrosion resistant member comprising a sintered material having an α-AlOcrystal and an YAG (yttrium-aluminum-garnet) crystal. The corrosion resistant member contains metal elements, 70 to 98% by mass (inclusive) of Al in terms of AlOand 2 to 30% by mass of Y in terms of YO. The corrosion resistant member has a peak intensity ratio I/Iwithin the range from 0.94 to 1.98, preferably. 2.21 or higher, wherein Iand Irepresent peak intensities attributed to the (116) face and the (104) face, respectively, of an α-AlOcrystal as measured by X-ray diffractometry on its surface layer.