The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2013
Filed:
Aug. 18, 2006
Applicants:
Eiichi Matsumoto, Mitsuke, JP;
Yoshiko Abe, Mitsuke, JP;
Yuji Yanagi, Hiroshima, JP;
Inventors:
Assignee:
Canon Tokki Corporation, Niigata, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 23/00 (2006.01); C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
There is provided a method of vacuum evaporation comprising causing evaporated material () from vacuum evaporation source () furnished with container () with its one side open accommodating organic material () to form a film on opposed substrate (), wherein the vacuum evaporation source has heating element () not fixed to the container, and being in contact with the surface of organic material held in the container, and wherein the organic material is evaporated by heating of the heating element only, the evaporated material released through at least one hole () or at least one slit made in the heating element.