The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2013
Filed:
Nov. 24, 2009
Yasuhiro Isobe, Kyoto, JP;
Osamu Horinouchi, Otsu, JP;
Yuki Tanaka, Kyoto, JP;
Masao Yamaguchi, Kyoto, JP;
Yukimasa Furukawa, Kusatsu, JP;
Yasuhiro Isobe, Kyoto, JP;
Osamu Horinouchi, Otsu, JP;
Yuki Tanaka, Kyoto, JP;
Masao Yamaguchi, Kyoto, JP;
Yukimasa Furukawa, Kusatsu, JP;
Horiba STEC, Co., Ltd., Kyoto-shi, JP;
Abstract
In order to improve a measurement accuracy of a mass flow meter, the mass flow meter comprises a flow rate calculating section that obtains an output signal from a sensor section having a thermosensitive resistive element arranged in a flow channel where a sample gas flows and that calculates a flow rate of the sample gas, a pressure measuring section that measures a primary side pressure in the flow channel, and a flow rate correcting section that corrects the measured flow rate obtained by the flow rate calculating section by the use of the primary side pressure obtained by the pressure measuring section and a gas coefficient determined by an isobaric specific heat of the sample gas.