The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2013
Filed:
Apr. 16, 2009
Applicants:
Arnaud Favre, Annecy, FR;
Erwan Godot, Annecy, FR;
Bertrand Bellet, Chambery, FR;
Inventors:
Assignee:
Alcatel Lucent, Paris, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention concerns a measurement station for the measurement of particle contamination of a transport pod for the conveyance and atmospheric storage of semiconductor substrates, such pod comprising a casing capable of being closed by means of a removable access door, such station comprising: The invention also concerns a method for the measurement of particle contamination of a transport pod for the conveyance and atmospheric storage of semiconductor substrates.