The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 15, 2013
Filed:
Oct. 13, 2010
Monolithic passive thz detector with energy concentration on sub-pixel suspended mems thermal sensor
Israel Berger, Haifa, IL;
Danny Elad, Liman, IL;
David Goren, Nesher, IL;
Thomas Erwin Morf, Gross, CH;
Israel Berger, Haifa, IL;
Danny Elad, Liman, IL;
David Goren, Nesher, IL;
Thomas Erwin Morf, Gross, CH;
International Business Machines Corporation, Armonk, NY (US);
Abstract
A THz radiation detector comprising a plurality of antenna arms separated from a suspended platform by an isolating thermal air gap. The detector functions to concentrate THz radiation energy into the smaller suspended MEMS platform (e.g., membrane) upon which a thermal sensor element is located. The THz photon energy is converted into electrical energy by means of a pixilated antenna using capacitive coupling in order to couple this focused energy across the thermally isolated air gap and onto the suspended membrane on which the thermal sensor is located.