The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 15, 2013
Filed:
Sep. 19, 2008
Jochen Zoellin, Stuttgart, DE;
Axel Franke, Ditzingen, DE;
Kathrin Van Teeffelen, Stuttgart, DE;
Christina Leinenbach, Ensdorf, DE;
Jochen Zoellin, Stuttgart, DE;
Axel Franke, Ditzingen, DE;
Kathrin Van Teeffelen, Stuttgart, DE;
Christina Leinenbach, Ensdorf, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A sensor element is provided for sensing accelerations in three spatial directions, which furnishes reliable measurement results and moreover can be implemented economically and with a small configuration. The sensor element encompasses at least one seismic mass deflectable in three spatial directions, a diaphragm structure that functions as a suspension mount for the seismic mass, and at least one stationary counterelectrode for capacitive sensing of the deflections of the diaphragm structure. According to the exemplary embodiments and/or exemplary methods of the present invention, the diaphragm structure encompasses at least four electrode regions, electrically separated from one another, that are mechanically coupled via the seismic mass.