The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2013
Filed:
Jul. 06, 2011
Applicants:
Manabu Hakko, Utsunomiya, JP;
Miyoko Kawashima, Haga-gun, JP;
Inventors:
Manabu Hakko, Utsunomiya, JP;
Miyoko Kawashima, Haga-gun, JP;
Assignee:
Canon Kabushiki Kaisha, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention provides a generation method that obtains a position at which an auxiliary pattern is to be placed and generates a mask pattern (its data), which achieves excellent imaging performance, even when a halftone mask is used as an original.
Hakko, Manabu. (2013). Method, computer-readable storage medium, and apparatus for generating a mask data and fabricating process (U.S. Patent No. 8352892). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8352892
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