The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2013
Filed:
May. 16, 2007
Yukiko Fukami, Kanagawa, JP;
Yukiko Fukami, Kanagawa, JP;
Kirin Techno-System Company, Limited, Kanagawa, JP;
Abstract
A surface inspection apparatus, which includes a detecting device of scanning a surface of an inspection object with an inspection light and outputting a signal corresponding to a light amount of refection light from the surface, generates a two-dimensional image of the surface of the inspection object on the basis of the output signal of the detecting device (S), classifies pixels contained in the two-dimensional image into a first group of pixels having tones corresponding to defects on the surface of the inspection object and a second group of pixels having tones not corresponding to the defects, extracts the first group of pixels as a defect candidate part for each region surrounded by second groups of pixels (Sto S), discriminates a defect candidate part larger than a prescribed size as a defect (S), inspects the two-dimensional image for each specific inspection region, and identifies an inspection region as a defect region, in which density of defect candidate parts that are smaller than the prescribed size is equal to or more than a prescribed level (S, S).