The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8350578 B1

PDF
Full Text
Expired
Date of Patent:
Jan. 08, 2013

Filed:

Feb. 18, 2010
Applicants:

Akram Sarwat Sadek, Somerset, GB;

Rassul Bulatovich Karabalin, North Hills, CA (US);

Michael L. Roukes, Pasadena, CA (US);

Sotirios K. Masmanidis, Pasadena, CA (US);

Inventors:

Akram Sarwat Sadek, Somerset, GB;

Rassul Bulatovich Karabalin, North Hills, CA (US);

Michael L. Roukes, Pasadena, CA (US);

Sotirios K. Masmanidis, Pasadena, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 29/22 (2006.01); G01R 23/00 (2006.01); H01L 41/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A system, device, method, and apparatus provide the ability to wire a voltage sensitive device to a nanoelectromechanical system (NEMS) resonator. A voltage sensitive device is configured to detect one or more voltage signals and output one or more electrical potentials in real-time. An array of piezoelectric NEMS resonators (with each resonator tuned to a unique frequency) is used to receive the output electrical potentials and convert each output electrical potential to a corresponding resonance frequency varying signal. The output signal from each resonator varies in linear proportion to the resonator's corresponding frequency variation arising from the applied electrical potential. The frequency varying signals are multiplexed together into a single readout signal path that is monitored to determine variations in vibrational amplitude. A demodulation device deconvolves the multiplexed frequency varying signals to recover and uniquely identify the output electrical signal.


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