The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2013
Filed:
Apr. 21, 2010
Ryo Ohtomo, Chigasaki, JP;
Toshimitsu Kawase, Ebina, JP;
Kinya Kamiguchi, Kamakura, JP;
Takeshi Yamamoto, Tokyo, JP;
Tsukasa Abe, Isehara, JP;
Ryo Ohtomo, Chigasaki, JP;
Toshimitsu Kawase, Ebina, JP;
Kinya Kamiguchi, Kamakura, JP;
Takeshi Yamamoto, Tokyo, JP;
Tsukasa Abe, Isehara, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A vacuum vessel includes a face plate, a rear plate having an interior surface that opposes the face plate, and a side wall joining the face plate and the rear plate, and a plurality of plate-like spacers provided between the face plate and the rear plate so that lengthwise directions thereof are parallel to each other. In addition, a plurality of linear fixing members are adhered to an exterior surface of the rear plate on the opposite side from the interior surface at mutually prescribed intervals and along the lengthwise direction of the plurality of spacers.