The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 08, 2013

Filed:

Feb. 17, 2011
Applicants:

Isao Muragishi, Osaka, JP;

Kai Takayuki, Kyoto, JP;

Saito Daishiro, Toyama, JP;

Daisuke Yamamoto, Okayama, JP;

Takeshi Koiwasaki, Toyama, JP;

Inventors:

Isao Muragishi, Osaka, JP;

Kai Takayuki, Kyoto, JP;

Saito Daishiro, Toyama, JP;

Daisuke Yamamoto, Okayama, JP;

Takeshi Koiwasaki, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01);
U.S. Cl.
CPC ...
Abstract

A base conductive member is formed on a surface and in a hole section of a substrate, and a resist is formed on a part of the base conductive member in which a conductive layer is not to be formed. The conductive layer is formed on a part except for the part in which the resist has been formed, and a mask metal is formed on the conductive layer. Then, the resist is removed, and the base conductive member is etched using the mask metal as a mask to form the conductive layer into a predetermined shape.


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