The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2013
Filed:
Jan. 29, 2010
Maha M. Khayyat, Yorktown Heights, NY (US);
Devendra K. Sadana, Yorktown Heights, NY (US);
Brent A. Wacaser, Garrison, NY (US);
Maha M. Khayyat, Yorktown Heights, NY (US);
Devendra K. Sadana, Yorktown Heights, NY (US);
Brent A. Wacaser, Garrison, NY (US);
International Business Machines Corporation, Armonk, NY (US);
King Abdulaziz City for Science and Technology, Riyadh, SA;
Abstract
A method of fabricating templated semiconductor nanowires on a surface of a semiconductor substrate for use in semiconductor device applications is provided. The method includes controlling the spatial placement of the semiconductor nanowires by using an oxygen reactive seed material. The present invention also provides semiconductor structures including semiconductor nanowires. In yet another embodiment, patterning of a compound semiconductor substrate or other like substrate which is capable of forming a compound semiconductor alloy with an oxygen reactive element during a subsequent annealing step is provided. This embodiment provides a patterned substrate that can be used in various applications including, for example, in semiconductor device manufacturing, optoelectronic device manufacturing and solar cell device manufacturing.