The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2013
Filed:
Sep. 28, 2010
Russell Weldon Black, Longmont, CO (US);
Robert Dwayne Gossman, Aurora, CO (US);
Patrick Lynch O'keefe, Loveland, CO (US);
Scott Daniel Feldman-peabody, Golden, CO (US);
Russell Weldon Black, Longmont, CO (US);
Robert Dwayne Gossman, Aurora, CO (US);
Patrick Lynch O'Keefe, Loveland, CO (US);
Scott Daniel Feldman-Peabody, Golden, CO (US);
PrimeStar Solar, Inc., Arvada, CO (US);
Abstract
A sputtering cathode is generally provided. The sputtering cathode can include a semiconducting target (e.g., a cadmium sulfide target, a cadmium tin oxide target, etc.) defining a sputtering surface and a back surface opposite to the sputtering surface. A backing plate can be positioned facing the back surface of the target and non-bonded to the back surface of the target. A non-bonding attachment mechanism can removably hold the target within the sputtering cathode such that the back surface is facing the backing plate during sputtering.