Base isolation table with damping mechanism and base isolation table unit using the same

Abstract

Provided are a vibration isolating table () with damping mechanism having initial rigidity so that a vibration isolation subject is not swayed under a state in which no vibrations act, and configured to function in a case where vibrations act so that the vibration isolation subject can be protected, and a vibration isolating table unit () using the vibration isolating table (). The vibration isolating table includes a fixed plate (); a guiding member () provided so as to be freely movable in an X direction relative to the fixed plate (); a movable plate () provided so as to be freely movable relative to the guiding member () in a Y direction orthogonal to the X direction; an X-directional circulation belt () configured to circulate in accordance with X-directional movement of the guiding member () relative to the fixed plate (); a Y-directional circulation belt () configured to circulate in accordance with Y-directional movement of the movable plate () relative to the guiding member (); and rotary dampers () respectively provided to the fixed plate () and the movable plate (), and respectively including rotationally driven members () around which the X-directional circulation belt () and the Y-directional circulation belt () are respectively looped, the rotary dampers () being configured to respectively impart resistance to rotational motion of the rotationally driven members ().