The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2013
Filed:
Oct. 02, 2008
Krassimir T. Krastev, Eindhoven, NL;
Hendrikus W. L. A. M. Van Lierop, Eindhoven, NL;
Hermanus M. J. R. Soemers, Eindhoven, NL;
Renatus H. M. Sanders, Eindhoven, NL;
Krassimir T. Krastev, Eindhoven, NL;
Hendrikus W. L. A. M. van Lierop, Eindhoven, NL;
Hermanus M. J. R. Soemers, Eindhoven, NL;
Renatus H. M. Sanders, Eindhoven, NL;
Innoluce B.V., Eindhoven, NL;
Abstract
A MEMS scanning micromirror with reduced dynamic deformation with a mirror support including a rotation axis beamhaving a rotation axis; a pair of extension barsparallel to the rotation axis, each having a first end, a midpoint, and a second end; and a pair of X beams, each of the pair of X beamshaving a cross midpoint. One of the pair of X beamsis connected to the first endand the midpointof each of the pair of extension bars; the other of the pair of X beamsis connected to the midpointand the second endof each of the pair of extension bars; and the rotation axis beamis connected to the cross midpointof each of the pair of X beams