The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2013
Filed:
Oct. 29, 2010
Lars Markwort, Haimhausen, DE;
Rajeshwar Chhibber, San Jose, CA (US);
Klaus Eckerl, Hutthurm, DE;
Norbert Harendt, Hutthurm, DE;
Lars Markwort, Haimhausen, DE;
Rajeshwar Chhibber, San Jose, CA (US);
Klaus Eckerl, Hutthurm, DE;
Norbert Harendt, Hutthurm, DE;
Nanda Technologies GmbH, Unterschleissheim, DE;
Abstract
An inspection system includes imaging optics for imaging an object plane into an image plane. The imaging optics include an objective lens having positive optical power, a first lens group having negative optical power, and a second lens group having positive optical power. The optical elements are arranged along a common unfolded optical axis with a pupil plane of the imaging optics located between the first lens group and the second lens group.