The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2013
Filed:
Jan. 20, 2009
Hayim Abrevaya, Kenilworth, IL (US);
Richard R. Willis, Cary, IL (US);
Stephen T. Wilson, Libertyville, IL (US);
Hayim Abrevaya, Kenilworth, IL (US);
Richard R. Willis, Cary, IL (US);
Stephen T. Wilson, Libertyville, IL (US);
UOP LLC, Des Plaines, IL (US);
Abstract
A process for forming a zeolite beta dielectric layer onto a substrate such as a silicon wafer has been developed. The zeolite beta is characterized in that it has an aluminum concentration from about 0.1 to about 2.0 wt. %, and has crystallites from about 5 to about 40 nanometers. The process involves first dealuminating a starting zeolite beta, then preparing a slurry of the dealuminated zeolite beta followed by coating a substrate, e.g. silicon wafer with the slurry, heating to form a zeolite beta film and treating the zeolite beta with a silylating agent.