The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2013
Filed:
Jan. 18, 2011
Applicants:
Koji Watanabe, Kawasaki, JP;
Shin Koyama, Kawasaki, JP;
Inventors:
Koji Watanabe, Kawasaki, JP;
Shin Koyama, Kawasaki, JP;
Assignee:
Renesas Electronics Corporation, Kawasaki-shi, Kanagawa, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of forming a semiconductor device includes forming a dummy metal gate layer including work function metals directly on a base insulator, diffusing the work function metals into the base insulator by annealing, removing the dummy metal gate layer by a wet etching, forming a metal gate on the base insulator, and forming a high-k insulator on the metal gate.